• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    PURPOSE: To appropriately manufacture a magnetoresistive effect magnetic head having no characteristics deterioration by effectively suppressing electrostatic destruction due to ESD(electrostatic discharge) and EOS(electrical over stress). CONSTITUTION: A shortcircuit pattern for electrically shortcircuiting an element circuit of a MR element is formed in a lamination type magnetic head forming stage S1 and the shortcircuit pattern is cut before a precisely polishing stage S4 is performed or during a wafer bar cutting stage S6.
    公开号:KR20020006448A
    申请号:KR1020010041101
    申请日:2001-07-10
    公开日:2002-01-19
    发明作者:다카다아키오；사사키가츠키；시미즈이도시히코；마츠키고키
    申请人:이데이 노부유끼；소니 가부시끼 가이샤；
    IPC主号:
    专利说明:

    Method for manufacturing magneto-resistive effect type magnetic heads
    [21] The present invention relates to a method of manufacturing a magnetoresistance effect type magnetic head used for example as a reproducing head in a hard disk drive.
    [22] Recently, in a magnetic recording / reproducing apparatus such as a hard disk drive, a magnetoresistance effect type magnetic head (hereinafter referred to as MR head) has been widely used as a reproduction head for reading signals recorded on a magnetic recording medium. .
    [23] This MR head is a magnetic head which reads out a signal recorded on the magnetic recording medium by using the magnetoresistive effect of the magnetoresistive element (hereinafter referred to as MR element). The MR head generally includes a pair of upper and lower magnetic shield layers made of a soft magnetic film, a gap made of a nonmagnetic nonconductive film between the upper and lower pairs of magnetic shield layers, and the gap. It has an MR element formed of a thin film embedded in it. In this MR head, the MR element is formed so that a part thereof is exposed to the outside, and the resistance value changes in response to the change in the external magnetic field. In addition, this MR element is electrically connected to a pair of terminal portions, and a change in the resistance value of the MR element due to a change in the external magnetic field can be detected from the terminal portion as a voltage change.
    [24] This MR head has a high reproduction sensitivity compared to an inductive magnetic head that reads a signal recorded on a magnetic recording medium by magnetic induction, and can reliably detect a slight external magnetic field change. Therefore, it is suitable as a reproducing head for a magnetic recording and reproducing apparatus aiming at higher recording density. In particular, in recent years, a giant magnetoresistive element (hereinafter referred to as a GMR element) having a spin valve structure that exhibits a giant magneto-resistive effect that is larger than a conventional anisotropic magnetoresistance effect has been used as an MR element. Going, the regeneration sensitivity has improved considerably. Therefore, the MR head is also an essential device for realizing higher density of recording density.
    [25] In order to cope with the higher density of recording density, it is preferable that the width and height of the above-described MR head be smaller in size. That is, the reduced width MR head realizes a reduction in track width and track pitch, and the reduced height MR head can realize an improvement in data output.
    [26] On the other hand, as the size of the above-described MR head becomes smaller and smaller, the electrostatic breakdown due to electrostatic discharge (ESD), overvoltage and electrical current (EOS) during the manufacturing process of the MR head is reduced. Often happens.
    [27] As described above, the MR head has a structure in which a gap is generally provided between a pair of upper and lower magnetic shield layers, and an MR element is embedded in this gap. The gaps between the magnetic shield layers are very thin in thickness or gap length of several hundred nm. Therefore, if a potential difference occurs between both ends of this gap, element destruction may occur in the MR element embedded in the gap.
    [28] This potential difference across the gap easily occurs, for example, when an operator accidentally touches the MR head, or when charged material accidentally contacts the MR head. In addition, as described above, the MR head is exposed to the outside of a part of the MR element, and therefore is very sensitive to external magnetic field changes. Therefore, potential differences tend to occur structurally. For this reason, in the manufacturing process of an MR head, it is necessary to take measures especially against electrostatic destruction like manufacturing processes, such as a semiconductor integrated circuit and a liquid crystal panel.
    [29] Therefore, in the manufacturing process of the MR head, various measures to be considered effective against electrostatic destruction are taken. For example, it is mandatory for workers to wear antistatic shoes, antistatic clothes, wrist straps, earthing devices, ionizers, and electroconductors. Use a mat.
    [30] However, even if the above measures are taken, there are often found deterioration in characteristics of the manufactured MR heads, which are thought to be caused by electrostatic destruction. Therefore, it is a current state that the electrostatic destruction cannot be prevented completely.
    [31] In particular, in order to cope with higher recording density, MR heads having smaller element widths and element heights deteriorate their characteristics even at a low charging potential of about 25 V, resulting in electrostatic destruction by ESD or EOS. Several MR heads have been found. In the future, when higher density of recording density proceeds, such electrostatic destruction is considered to occur more and more. Therefore, it is desirable to take countermeasures considered to be more effective against electrostatic destruction of the MR head.
    [32] Therefore, the present invention was devised in view of the above circumstances, and it is possible to suppress electrostatic breakdown by ESD and EOS, and to provide a magnetoresistance effect type magnetic head appropriately without deterioration of characteristics. It is an object of the present invention to provide a method of manufacturing a magnetic head to overcome the aforementioned obstacles.
    [33] In the method of manufacturing a magnetoresistive effect type magnetic head according to the present invention, a plurality of element circuits having a magnetoresistive element and a pair of terminal portions connected to the magnetoresistive effect element are formed on the wafer, and the plurality of element circuits When the formed wafer is cut by each element circuit, when a plurality of magnetoresistance effect type magnetic heads are collectively manufactured, in the step of forming the element circuit on the wafer, a short circuit pattern for electrically shorting the element circuit is formed. It is formed for each device circuit, and in the step before finally completing the magnetoresistance effect type magnetic head, cutting the short circuit pattern.
    [34] According to the manufacturing method of the magnetoresistance effect type magnetic head of the present invention, in the step of forming an element circuit on a wafer, since a short circuit pattern for electrically shorting the element circuit is formed for each element circuit, an electrostatic discharge (ESD) or Electrostatic destruction of the magnetoresistive element due to overvoltage and overcurrent (EOS) is effectively suppressed. The short circuit pattern of each of the element circuits is cut at the stage before completing the magnetoresistance effect type magnetic head. Therefore, the completed magnetoresistance effect type magnetic head is obtained by the resistance value of the magnetoresistance effect element according to the change of the external magnetic field. Can be detected appropriately.
    [35] In addition, it is preferable to cut | disconnect a short circuit pattern in the step before determining the element height of a magnetoresistive effect element, or in the step of cutting | disconnecting each element circuit the wafer in which the some element circuit was formed.
    [36] In the case where the short circuit pattern is cut at the step of determining the height of the magnetoresistive element, the short circuit pattern prevents electrostatic breakdown of the magnetoresistive element due to electrostatic discharge (ESD), overvoltage, or overcurrent (EOS). What can be effectively suppressed is up to the step before determining the element height of the magnetoresistive element. In this case, the resistance value of the magnetoresistive element can be detected when the element height of the magnetoresistive element is determined. Therefore, based on the resistance value of the magnetoresistive element detected earlier, the final element height of the magnetoresistive element of good performance can be determined while investigating the characteristics of the manufactured magnetoresistive effect magnetic head in advance.
    [37] In the case where the short circuit pattern is cut in the step of cutting the wafer on which the plurality of device circuits are formed for each device circuit, the device height of the magnetoresistive effect can be determined while detecting the resistance value of the magnetoresistive effect element. Can not. Instead, the electrostatic breakdown of the magnetoresistive element due to electrostatic discharge (ESD), overvoltage, or overcurrent (EOS) can be effectively suppressed until the wafer having a plurality of device circuits is cut for each device circuit. . In this case, the characteristic test of the magnetoresistance effect type magnetic head is performed after the wafer is cut for each element circuit.
    [38] The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings.
    [1] 1 is a perspective view of the slider head seen from the air lubrication surface ABS side.
    [2] 2 is an enlarged perspective view of a stacked magnetic head of the slider head;
    [3] 3 is a flowchart for explaining a method for producing a slider to which the present invention is applied.
    [4] 4 is a perspective view of a wafer on which a plurality of stacked heads and terminal portions are formed for explaining a method of manufacturing a slider head to which the present invention is applied.
    [5] Fig. 5 is a plan view showing a state in which a short circuit pattern for making a short circuit of an element circuit of an MR head is formed for explaining a method of manufacturing a slider head to which the present invention is applied.
    [6] 6 is a perspective view of a wafer bar illustrating a method for manufacturing a slider head to which the present invention is applied.
    [7] 7 is a view illustrating a method of manufacturing a slider head to which the present invention is applied, and FIG. 7A is a plan view showing an enlarged cutting position of a wafer bar, and FIG. 7B is a plan view illustrating a short circuit pattern formed by forming a groove.
    [8] 8 is a perspective view illustrating a method of manufacturing a slider head to which the present invention is applied and showing a state in which a resist pattern is formed on one main surface of a wafer bar.
    [9] Fig. 9 illustrates a method for manufacturing a slider head to which the present invention is applied, and a perspective view of a wafer bar having a convex pattern corresponding to a floating pattern on one main surface thereof.
    [10] 10 shows the characteristics of a slider head manufactured by a conventional manufacturing method.
    [11] 11 is a view showing the characteristics of the slider head manufactured by the manufacturing method according to the present invention.
    [12] 12 is a plan view illustrating another example of the shape of a short circuit pattern.
    [13] It is a top view which shows the other example of the shape of a short circuit pattern.
    [14] Explanation of symbols on the main parts of the drawings
    [15] 1: slider head 2: slider
    [16] 10: stacked magnetic heads 11a to 11d: terminal portion
    [17] 12: MR head 16: GMR element
    [18] 17, 18: regenerative electrode 24, 25: conductor pattern
    [19] 26: short circuit pattern 30: wafer
    [20] 31: wafer bar
    [39] Hereinafter, with reference to the accompanying drawings, preferred embodiments according to the present invention will be described in detail below. In the following description, the present invention is applied to the case of manufacturing a slider head for a hard disk drive, each having a slider having one main surface as an air lubricating surface and having a stacked magnetic head on one side of the slider. do. The stacked magnetic head is composed of a magnetoresistance effect magnetic head (hereinafter referred to as MR head) as a reproducing head, and an inductive thin film head for use as a recording head on the MR head. However, the present invention is not limited to the following examples, and can be widely applied to other cases of manufacturing the slider head.
    [40] The slider head 1 used for a hard disk drive has a slider 2 formed by molding a hard material such as AlTiC into a rectangular plate shape. The slider 2 receives a flow of air generated by the rotational operation of the magnetic disk used as the recording medium, and has one main surface 2a provided with a floatation pattern 3 for supporting the slider 2 itself. Has This floating pattern 3 is formed in a predetermined shape so that an appropriate floating force can be obtained on the slider 2 itself by receiving the air flow flowing in the arrow A direction in FIG. 1. The main surface 2a provided with this floating pattern 3 functions as an air lubricating surface (ABS).
    [41] The slider 2 has a side 2b on the air outlet side, which electrically connects the stacked magnetic head 10 and the external circuit with the input and read signals of the magnetic disk. Terminal portions 11a, 11b, 11c, and 11d for connection are provided.
    [42] The stacked magnetic head 10 has a reproducing MR head 12 for reading out a signal by a magnetoresistive effect, and a recording inductive thin film head 13 for inputting a signal by magnetic induction. The inductive thin film head 13 is stacked on the MR head 12.
    [43] The MR head 12 includes a lower magnetic shield layer 14 and an upper magnetic shield layer 15 each made of a soft magnetic film, and a lower magnetic shield layer 14 and a gap film made of a nonmagnetic non-conductive material. The magnetic field sensing MR element 16 is held between the upper magnetic shield layers 15. The MR element 16 has a GMR film having a spin valve structure capable of exhibiting a huge magnetoresistive effect (hereinafter, an MR element composed of this GMR film is referred to as a GMR element 16). The GMR element 16 is formed so that one end thereof faces the signal recording surface of the magnetic disk from the main surface 2a which is the air lubrication surface ABS of the slider 2. Further, one end side of the pair of regeneration electrodes 17 and 18 is connected to both left and right ends of the GMR element 16, respectively. The other end side of the regeneration electrodes 17 and 18 is connected to the terminal portions 11a and 11b via a conductor pattern.
    [44] In the slider head 12, the GMR element 16 of the MR head 12, a pair of reproducing electrodes 17 and 18, a conductor pattern pair, and a pair of terminal portions 11a and 11b are used as signals of a magnetic disk. An element circuit for reading the signal recorded on the recording surface is formed. In this MR head 12, the resistance value of the GMR element 16 changes in response to the magnetic field from the magnetic disk which changes in response to the signal recorded on the signal recording surface of the magnetic disk. Then, the change in the resistance value of the GMR element 16 is detected through the terminal portions 11a and 11b as the voltage change.
    [45] In the stacked magnetic head 10, the upper magnetic shield layer 15 of the MR head 12 also functions as the lower core 21 of the inductive thin film head 13. The inductive thin film head 13 constitutes a magnetic core together, and has a lower layer core 21 and an upper layer core 22 facing each other with a recording gap G on the main surface 2a side, which is an air lubricating surface of the slider 2. ) The inductive thin film head 13 is a thin film coil 23 laminated and wound between the lower layer core 21 and the upper layer core 22 at a position spaced apart from the main surface 2a of the slider 2. Has The lower layer core 21 and the upper layer core 22 are connected to each other at a position farthest from the main surface 2a of the slider 2.
    [46] The thin film coil 23 is formed in a spiral shape, the center of which is located at the portion where the lower core 21 and the upper core 22 are connected. The thin film coil 23 has an inner end and an outer end which are connected to the terminal portions 11c and 11d via a conductor pattern.
    [47] In the inductive thin film head 13, the thin film coil 23 is driven in accordance with a signal to be recorded on the signal recording surface of the magnetic disk, and between the lower core 21 and the upper core 22 forming the magnetic core together. From the gap G, a leakage flux is generated in accordance with the signal to be recorded. By applying such leakage magnetic flux, a signal is recorded on the signal recording surface of the magnetic disk.
    [48] The stacked magnetic head 10 thus constructed is formed on the side surface 2b, which is the air outlet side of the slider 2, under the thin film formation process. A protective film (not shown) made of Al 2 O 3 or the like is formed around the stacked magnetic head 10 of the slider head 1, and the laminated magnetic head 10 is protected by the protective film.
    [49] The slider head 1 configured as described above is attached to one end of the suspension arm of the hard disk drive so that the main surface 2a, which is the air lubrication surface ABS of the slider 2, faces the signal recording surface of the magnetic disk. . When the magnetic disk is rotated, an air flow is generated between the magnetic disk and the slider head 1. The main surface 2a, which is the air lubrication surface ABS of the slider 2, receives the air flow generated by the rotational operation of the magnetic disk to raise the slider head 1 by a predetermined amount of float. At this time, the stacked magnetic head 10 is driven to input or read signals to and from the magnetic disk.
    [50] Next, the method of manufacturing the slider head 1 by applying this invention is demonstrated.
    [51] 3 shows a manufacturing step for manufacturing the slider head 1. As shown, the slider head 1 includes a stacked magnetic head forming step S1, a wafer bar forming step S2, an ELG polishing step S3, a precision polishing step S4, and an etching step ( S5) and a wafer bar cutting process (S6).
    [52] First, in the stacked magnetic head forming step S1, as shown in FIG. 4, a plurality of stacked magnetic heads 10 and a plurality of terminal portions 11a, 11b, 11c, on a wafer 30 made of AlTiC or the like. 11d) is collectively formed by the thin film forming process. At this time, on the wafer 30, a plurality of resistance sensors 27 used in the ELG polishing step S3 to be described later are also used for each of the pair of stacked magnetic heads 10 and the terminal portions 11a, 11b, 11c, and 11d. Is formed. The wafer 30 finally becomes the slider 2 of the slider head 1.
    [53] In the manufacturing method according to the present invention, in this stacked magnetic head forming step S1, the device circuit of the MR head 12, that is, the device circuit for reading out the signal recorded on the signal recording surface of the magnetic disk is electrically shorted. A short-circuit pattern 26 for each of the pair of stacked magnetic heads 10 and the terminal portions 11a, 11b, 11c, and 11d includes the GMR elements 16 and the pair of regeneration electrodes 17 and 18 of the MR head 12. ), A pair of conductive patterns 24 and 25, and a pair of terminal portions 11a and 11b are electrically connected to each other.
    [54] One end 26a of this short-circuit pattern 26 is connected to the terminal portion 11a, and the other end 26b is connected to the terminal portion 11b. This short pattern 26 has a middle portion extending to the resistance sensor 27. This resistance sensor 27 is removed after the slider head 1 is finally completed. Therefore, the middle part of the short circuit pattern 26 extended to the resistance sensor 27 is also finally removed.
    [55] In this short circuit pattern 26, one end 26a and the other end 26b are connected only to the terminal portions 11a and 11b, and the other part is insulated from the element circuit and the resistance sensor 27.
    [56] Next, in the wafer bar forming step S2, the wafer 30 in which the plurality of magnetic heads 10 and the terminal portions 11a, 11b, 11c, and 11d are collectively formed is cut along the broken lines in FIG. 4. At this time, since the element circuit of the MR head 12 is short-circuited by the short circuit pattern 26, electrostatic destruction is prevented effectively to the GMR element 16 during this wafer bar formation step S2.
    [57] Next, in the ELG polishing step S3, ELG (Electric Lapping guide) polishing is performed on each wafer bar 31. At the time of performing ELG polishing, one main surface 31a of the wafer bar 31 is polished while controlling the polishing amount based on the output from the resistance sensor 27. Therefore, the element height of the GMR element 16 of the MR head 12, that is, the GMR element spaced apart from the main surface 31a side of the wafer bar 31 which ultimately becomes the air lubrication surface ABS of the slider 2. The height of 16 becomes a predetermined value.
    [58] The resistance sensor 27 is the same film as the GMR element 16 of the MR head 12 and has a sensor portion 27a located at the same height as the GMR element 16. And a pair of electrodes 27b and 27c are connected to this sensor part 27a, and the change of the resistance value of the sensor part 27a can be detected as a voltage change from these electrodes 27b and 27c.
    [59] The resistance values of the GMR element 16 of the MR head 12 and the sensor portion 27a of the resistance sensor 27 change depending on the height of these elements. In other words, the resistance values of these GMR elements 16 and the sensor portion 27a increase as the element height decreases. Therefore, by detecting the resistance value of the sensor portion 27a of the resistance sensor 27, it is possible to detect the element height of the GMR element 16 which has almost the element height of the sensor portion 27a.
    [60] In the ELG polishing step S3, the wafer bar 31 is based on the resistance value of the sensor portion 27a of the resistance sensor 27 so that the element height of the GMR element 16 has a predetermined value. While the height of the element is detected, the main surface 31a is polished by a predetermined amount. At this time, since the element circuits of the respective MR heads 12 are short-circuited by the short circuit pattern 26, the electrostatic breakdown of the GMR element 16 is effectively prevented in this ELG polishing step S3.
    [61] In addition, the final element height of the GMR element 16 is determined when polishing which gives a crown shape to the main surface 31a of the wafer bar 31 is performed. Therefore, in the ELG polishing step S3, the polishing amount is controlled in view of the polishing to be performed in the precision polishing step S4. The wafer bar 31 is polished so that the main surface 31a reaches the polishing position shown by the broken line in FIG.
    [62] Next, in the manufacturing method to which the present invention is applied, the short circuit pattern 26 formed in the laminated magnetic head step S1 is cut before proceeding to the precision polishing step S4. As shown in FIGS. 7A and 7B, the short-circuit pattern 26 is cut off by applying grinding stone to a cutting position at which the resistance sensor 27 of the wafer bar 31 is formed. And the groove 32 in which the intermediate portion of the short circuit pattern 26 is cut is formed in the wafer bar 31. The groove 32 also functions as a positioning groove for the abrasive stone at the cutting position at which the wafer bar 31 is cut in the wafer cutting step S6.
    [63] Electrostatic destruction prevention is not performed after the short circuit pattern 26 is cut, but before the short circuit pattern 26 is cut off, electrostatic destruction of the GMR element 16 due to ESD or EOS is reliably prevented. The incidence rate of electrostatic destruction occurring in (16) can be greatly reduced.
    [64] Since the element circuit of the MR head 12 is opened after cutting the short circuit pattern 26, the GMR element 16 is precisely detected while detecting the resistance value of the GMR element 16 in the precision polishing process S4. The height of the element of the GMR element 16 can be determined with high precision so as to improve the performance of the MR head 12 by polishing.
    [65] After the cutting of the short-circuit pattern 26 is finished, fine polishing is performed for each wafer bar 31 in the fine polishing step S4. In this fine polishing step S4, the main surface 31a of the wafer bar 31 is polished to have a crown shape capable of realizing a good floating posture of the slider 2 finally obtained, and the element height of the GMR element 16 is The final element height of the GMR element 16 is adjusted to determine. At this time, the precision polishing is performed while detecting the resistance value of the GMR element 16. As described above, since the resistance value of the GMR element changes according to the element height of the GMR element, the final element height of the GMR element 16 having good performance is determined based on the measured resistance value of the MR head 12. It can be determined by measuring the resistance value of the GMR element 16 to investigate the characteristics and polishing the GMR element 16 based on this irradiation.
    [66] Next, in the etching step S5, as shown in FIG. 8, a resist pattern 33 corresponding to the floating pattern 3 of the slider 2 on the main surface 31a of the wafer bar 31. pattern is formed by photolitho processing. And using this resist pattern 33, the etching process like dry etching is performed with respect to the main surface 31a of the wafer bar 31, and as shown in FIG. 9, the main surface (of the wafer bar 31 ( On 31a), the convex pattern which is the floating pattern 3 of the slider 2 is finally formed.
    [67] Next, in the wafer bar cutting step S6, the wafer bar 31 is cut along the groove 32 formed when the short circuit pattern 26 is cut. Therefore, the slider head 1 shown in FIG. 1 is completed.
    [68] As described above, according to the manufacturing method to which the present invention is applied, the wafer bar forming step (S2) in the state in which the element circuit of the MR head 12 is short-circuited by the short circuit pattern 26 formed in the stacked magnetic head forming step (S1). And the ELG polishing step S3, the electrostatic breakdown of the GMR element 16 due to ESD or EOS is reliably prevented, and the electrostatic breakdown of the GMR element 16 in the slider head 1 finally obtained. The occurrence rate of can be greatly reduced.
    [69] 10 shows the characteristics of the slider head manufactured by the conventional manufacturing method in which the shorting pattern 26 is not formed. 11 shows the characteristics of the slider head 1 produced by the manufacturing method according to the present invention in which the shorting pattern 26 is formed. The conventional manufacturing method is similar to the manufacturing method according to the present invention except that the shorting pattern 26 is not formed. In the slider head manufactured by the conventional manufacturing method, as shown in FIG. 10, no power output can be obtained even though the resistance value is high, or the characteristics thereof are deteriorated (represented by D). A large number of parts) are shown. The deterioration of the characteristics of the slider head is considered to have occurred due to the electrostatic destruction of the GMR element 16.
    [70] On the other hand, as shown in Fig. 11, it can be seen that such characteristic deterioration does not occur at all in the slider 1 manufactured by the manufacturing method to which the present invention is applied. This is considered to be because electrostatic destruction did not occur in the GMR element 16. As a result, when the slider head 1 is manufactured by the manufacturing method to which the present invention is applied, electrostatic destruction of the GMR element 16 can be effectively prevented.
    [71] In the above description, the shorting pattern 26 is cut before the final element height of the GMR element 16 is determined in the fine polishing step S4. However, the short circuit pattern 26 may be cut in the wafer bar cutting process S6 in which the wafer bar 31 is cut.
    [72] In the case where the short circuit pattern 26 is cut at the same time as the wafer bar 31 is cut, the element circuit of the MR head 12 is connected by the short circuit pattern 26 until the wafer bar 31 is cut. Since the shorted state remains, the final element height of the GMR element 16 cannot be determined by precisely polishing the GMR element 16 while measuring the resistance value of the GMR element 16 in the precision polishing process S4.
    [73] In this case, therefore, the wafer bar 31 controls the polishing machine so that the element height of the GMR element 16 has a finally predetermined value, so that the main surface 31a is polished exactly by a predetermined amount. Then, the characteristic test of the MR head 12 is performed after the wafer bar 31 is cut | disconnected in the wafer bar cutting process S6, and the slider head 1 is completed. In addition, when the main surface 31a of the wafer bar 31 is polished precisely, the groove 32 is not formed, and since the resistance sensor 27 can be used, polishing is performed in accordance with the output from the resistance sensor 27. Precise polishing can be performed while controlling the amount.
    [74] As described above, when the short circuit pattern 26 is cut at the same time as the wafer bar 31 is cut, the GMR element 16 can be precisely polished while measuring the resistance value of the GMR element 16. Can not. In this case, the element circuit of the MR head 12 is short-circuited by the short circuit pattern 26 until the wafer bar 31 is cut | disconnected. Electrostatic destruction of the GMR element 16 due to ESD or EOS is reliably prevented until the wafer bar 31 is cut. Therefore, electrostatic destruction of the GMR element 16 can be more reliably prevented. In order to cope with the higher density of recording density, it is considered that electrostatic breakdown often occurs when the element width and the element height of the GMR element 16 are reduced in size. Therefore, in such a case, it is very advantageous to simultaneously cut the short circuit pattern 26 when cutting the wafer bar 31.
    [75] When the short circuit pattern 26 is cut at the same time as the wafer bar 31 is cut, in order to more reliably prevent static destruction of the GMR element 16, the wafer bar 31 may be cut even if possible. For a long time, it is preferable that the element circuit of the MR head 12 remains shorted by the short circuit pattern 26. In this case, as shown in FIG. 12, the short circuit pattern 26 has the middle portion 26c of the other side of the wafer bar 31 such that the abrasive stone used reaches the middle portion 26c last. It is preferably located at the end 31b of.
    [76] In the case where the shorting pattern 26 has its middle portion 26c positioned at the other end 31b of the wafer bar 31, until the abrasive stone reaches the middle portion 26c of the shorting pattern, The element circuit of the MR head 12 is short-circuited by the short circuit pattern 26. Therefore, electrostatic destruction of the GMR element 16 can be prevented more reliably. In this case, even when the groove 32 is formed by applying abrasive stone at the cutting position of the wafer bar 31, the short circuit pattern 26 is not cut. Therefore, the groove 32 which also functions as a positioning groove when applying the abrasive stone at the cutting position may be formed before the wafer bar cutting step S6.
    [77] It may not be desirable to greatly change the shape of the shorting pattern 26 depending on when the shorting pattern 26 is cut. On the basis of the shape of the short circuit pattern 26 shown in FIG. 5, when the cutting of the short circuit pattern 26 is performed at the same time as the cutting of the wafer bar 31, it is added to the short circuit pattern 26 of this basic shape. It is preferable to add a pattern 28 (additional pattern) to form the short-circuit pattern 26 as shown in FIG. In this case, the change of the shape corresponding to the cutting timing of the short circuit pattern 26 can be minimized.
    [78] In the above description, the shape of the short circuit pattern 26 is preferable examples of the pattern shape for shorting the element circuits respectively, and the present invention is not limited to these examples. That is, the shape of the short circuit pattern 26 may be appropriately changed in consideration of various conditions such as manufacturing process and cost. In addition, the short circuit pattern 26 may be formed by being embedded in the depth direction instead of being formed flat as in the above example.
    [79] According to the manufacturing method of the magnetoresistance effect type magnetic head of the present invention, since a short circuit pattern electrically shorting at the step of forming the device circuit on the wafer is formed in each device circuit, the electrostatic discharge until the short circuit pattern is cut off. Electrostatic destruction in the magnetoresistive element can be effectively suppressed due to (ESD), overvoltage, and overcurrent (EOS). In addition, since the short circuit pattern of each element circuit is cut at the stage before completing the magnetoresistance effect type magnetic head, the magnetoresistance element is free of characteristic deterioration due to electrostatic breakdown, and the magnetoresistance effect element is caused by the change of the external magnetic field. A magnetic head capable of properly detecting a change in the resistance value of can be manufactured.
    权利要求:
    Claims (3)
    [1" claim-type="Currently amended] A plurality of element circuits having a magnetoresistive element and a pair of terminal portions connected to the magnetoresistive element are formed on the wafer, and the wafer on which the plurality of element circuits are formed is cut with respect to each element circuit to form a plurality of magnet circuits. In the magnetoresistance effect type magnetic head manufacturing method which manufactures the resistance effect type magnetic head collectively,
    Forming a short circuit pattern in each device circuit electrically shorting the device circuit in the step of forming the device circuit on the wafer;
    A method of manufacturing a magnetoresistance type magnetic head comprising cutting the short circuit pattern of each device circuit prior to completing the magnetoresistance type magnetic head.
    [2" claim-type="Currently amended] The method of claim 1,
    A magnetoresistance effect type magnetic head manufacturing method for cutting the short-circuit pattern, prior to determining the element height of the magnetoresistance effect element.
    [3" claim-type="Currently amended] The method of claim 1,
    A method of manufacturing a magnetoresistance effect type magnetic head for cutting the short circuit pattern in the step of cutting the wafer on which the plurality of device circuits are formed for each device circuit.
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    同族专利:
    公开号 | 公开日
    US20020066177A1|2002-06-06|
    JP2002025020A|2002-01-25|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2000-07-11|Priority to JPJP-P-2000-00210327
    2000-07-11|Priority to JP2000210327A
    2001-07-10|Application filed by 이데이 노부유끼, 소니 가부시끼 가이샤
    2002-01-19|Publication of KR20020006448A
    优先权:
    申请号 | 申请日 | 专利标题
    JPJP-P-2000-00210327|2000-07-11|
    JP2000210327A|JP2002025020A|2000-07-11|2000-07-11|Method for manufacturing magnetoresistive effect magnetic head|
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